Diffusion barrier properties of AlMoNbSiTaTiVZr high-entropy alloy layer between copper and silicon

标题
Diffusion barrier properties of AlMoNbSiTaTiVZr high-entropy alloy layer between copper and silicon
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 16, Pages 5527-5530
出版商
Elsevier BV
发表日期
2007-07-17
DOI
10.1016/j.tsf.2007.07.109

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