High-performance capacitive humidity sensor based on silicon nanoporous pillar array

标题
High-performance capacitive humidity sensor based on silicon nanoporous pillar array
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 2, Pages 948-951
出版商
Elsevier BV
发表日期
2008-07-25
DOI
10.1016/j.tsf.2008.07.016

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