Effect oxygen exposure on the quality of atomic layer deposition of ruthenium from bis(cyclopentadienyl)ruthenium and oxygen

标题
Effect oxygen exposure on the quality of atomic layer deposition of ruthenium from bis(cyclopentadienyl)ruthenium and oxygen
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 21, Pages 7345-7349
出版商
Elsevier BV
发表日期
2008-02-20
DOI
10.1016/j.tsf.2008.02.011

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