Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure

标题
Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 16, Pages 5272-5276
出版商
Elsevier BV
发表日期
2007-07-14
DOI
10.1016/j.tsf.2007.07.067

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