Stress-induced surface damages in Ti–Si–N films grown by magnetron sputtering

标题
Stress-induced surface damages in Ti–Si–N films grown by magnetron sputtering
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 21, Pages 7609-7614
出版商
Elsevier BV
发表日期
2008-04-28
DOI
10.1016/j.tsf.2008.04.090

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