On the similarities between micro/nano lithography and topology optimization projection methods

Topology optimization of MEMS considering etching uncertainties using the level-set method

(2012) Gang-Won Jang et al.   INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING

A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography

(2012) Siu Kai Choy et al.   SIAM Journal on Imaging Sciences

Robust topology optimization accounting for misplacement of material

(2012) Miche Jansen et al.   STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION

Topology optimization considering material and geometric uncertainties using stochastic collocation methods

(2012) Boyan S. Lazarov et al.   STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION

Robust topology optimization accounting for spatially varying manufacturing errors

(2011) M. Schevenels et al.   COMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING

Robust topology optimization of photonic crystal waveguides with tailored dispersion properties

(2011) Fengwen Wang et al.   JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS

Pixelated source mask optimization for process robustness in optical lithography

(2011) Ningning Jia et al.   OPTICS EXPRESS

A new level-set based approach to shape and topology optimization under geometric uncertainty

(2011) Shikui Chen et al.   STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION

Impacts of cost functions on inverse lithography patterning

(2010) Jue-Chin Yu et al.   OPTICS EXPRESS

On projection methods, convergence and robust formulations in topology optimization

(2010) Fengwen Wang et al.   STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION

Manufacturing tolerant topology optimization

(2009) Ole Sigmund   ACTA MECHANICA SINICA

Volume preserving nonlinear density filter based on heaviside functions

(2009) Shengli Xu et al.   STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION