Block copolymer multiple patterning integrated with conventional ArFlithography

Highly Efficient Vertical Growth of Wall-Number-Selected, N-Doped Carbon Nanotube Arrays

(2009) Duck Hyun Lee et al.   NANO LETTERS

Soft Graphoepitaxy of Block Copolymer Assembly with Disposable Photoresist Confinement

(2009) Seong-Jun Jeong et al.   NANO LETTERS

Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order

(2009) S. Park et al.   SCIENCE

The Future of Lithography: SEMATECH Litho Forum 2008

(2008) C. Grant Willson et al.   ACS Nano

Hierarchically Organized Carbon Nanotube Arrays from Self‐Assembled Block Copolymer Nanotemplates

(2008) Duck Hyun Lee et al.   ADVANCED MATERIALS

Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers

(2008) Seong-Jun Jeong et al.   ADVANCED MATERIALS

Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer

(2008) Yeon Sik Jung et al.   NANO LETTERS

Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays

(2008) C. Tang et al.   SCIENCE

Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE