Patterning block copolymer thin films by deep X-ray lithography

标题
Patterning block copolymer thin films by deep X-ray lithography
作者
关键词
-
出版物
Soft Matter
Volume 6, Issue 14, Pages 3172
出版商
Royal Society of Chemistry (RSC)
发表日期
2010-05-24
DOI
10.1039/b925105g

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