Deep X-ray Lithography for Direct Patterning of PECVD Films

标题
Deep X-ray Lithography for Direct Patterning of PECVD Films
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 7, Issue 6, Pages 459-465
出版商
Wiley
发表日期
2010-02-23
DOI
10.1002/ppap.200900147

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started