Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites

标题
Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 189, Issue -, Pages 321-327
出版商
Elsevier BV
发表日期
2012-10-23
DOI
10.1016/j.sna.2012.10.015

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