4.6 Article

Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

期刊

SENSORS
卷 13, 期 1, 页码 865-874

出版社

MDPI
DOI: 10.3390/s130100865

关键词

temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography

资金

  1. National Science Council, Taipei, Taiwan [NSC 101-2627-E-002-005-, NSC 101-2220-E-002-002-]
  2. National Taiwan University [101R7624-2]

向作者/读者索取更多资源

In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 degrees C. At the optimized temperature of 300 C, the proposed sensor repeatedly obtained a rise/recovery time (Delta R: 0.9 R-0 to 0.1 R-0) of 3.2/17.5 s and a corresponding sensor response (Delta R/R-0) of 21.7% at an ethanol injection mass quantity of 0.2 mu g.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据