Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination

Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens

(2015) Ping Gao et al.   APPLIED PHYSICS LETTERS

Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination

(2014) Wei Zhang et al.   Plasmonics

Off Axis Illumination Planar Hyperlens for Non-contacted Deep Subwavelength Demagnifying Lithography

(2014) Wei Zhang et al.   Plasmonics

Pushing the resolution of photolithography down to 15nm by surface plasmon interference

(2014) Jianjie Dong et al.   Scientific Reports

Deep sub-wavelength imaging lithography by a reflective plasmonic slab

(2013) Changtao Wang et al.   OPTICS EXPRESS

High Contrast Superlens Lithography Engineered by Loss Reduction

(2012) Hong Liu et al.   ADVANCED FUNCTIONAL MATERIALS

High Aspect Subdiffraction-Limit Photolithography via a Silver Superlens

(2012) Hong Liu et al.   NANO LETTERS

Effect of Surface Morphology on the Optical Properties in Metal−Dielectric−Metal Thin Film Systems

(2011) Eunice S. P. Leong et al.   ACS Applied Materials & Interfaces

Increased process latitude in absorbance-modulated lithography via a plasmonic reflector

(2011) Charles W. Holzwarth et al.   OPTICS EXPRESS

Enhanced Surface Plasmon Resonance on a Smooth Silver Film with a Seed Growth Layer

(2010) Hong Liu et al.   ACS Nano

A smooth optical superlens

(2010) Pratik Chaturvedi et al.   APPLIED PHYSICS LETTERS

White-light scanning interferometer for absolute nano-scale gap thickness measurement

(2009) Zhiguang Xu et al.   OPTICS EXPRESS

Flying plasmonic lens in the near field for high-speed nanolithography

(2008) Werayut Srituravanich et al.   Nature Nanotechnology