White-light scanning interferometer for absolute nano-scale gap thickness measurement

标题
White-light scanning interferometer for absolute nano-scale gap thickness measurement
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 17, Issue 17, Pages 15104
出版商
The Optical Society
发表日期
2009-08-11
DOI
10.1364/oe.17.015104

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