期刊
PLASMA CHEMISTRY AND PLASMA PROCESSING
卷 34, 期 3, 页码 489-503出版社
SPRINGER
DOI: 10.1007/s11090-013-9511-3
关键词
Dusty plasmas; Silane; Nanoparticles
资金
- US National Science Foundation [CHE-1124752]
- US Department of Energy Office of Fusion Energy Science [DE-SC0001939]
- Minnesota Supercomputing Institute (MSI)
- Division Of Chemistry
- Direct For Mathematical & Physical Scien [1124752] Funding Source: National Science Foundation
A one-dimensional numerical model and simulation results are presented for a capacitively-coupled radio frequency parallel-plate argon-silane dusty plasma. The model includes self-consistently coupled numerical modules, including a plasma fluid model, a sectional aerosol model, and a simple chemistry model to predict rates of particle nucleation and surface growth. Operating conditions considered include 13.56 MHz frequency, 100 mTorr pressure, a 4-cm electrode gap, gas flow through the top electrode with a 30:1 ratio of argon to silane, and applied radio frequency voltage amplitude of either 100 or 250 V. In the higher voltage case two lobes of relatively large particles are formed by ion drag, while fresh nucleation occurs in the void between these lobes. It is shown that the reason that fresh nucleation occurs in the void involves an interplay among several coupled phenomena, including nanoparticle transport, the plasma potential profile, and trapping of silicon hydride anions that drive nucleation in this system.
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