Qualitative By-Product Identification of Plasma-Assisted TCE Abatement by Mass Spectrometry and Fourier-Transform Infrared Spectroscopy

标题
Qualitative By-Product Identification of Plasma-Assisted TCE Abatement by Mass Spectrometry and Fourier-Transform Infrared Spectroscopy
作者
关键词
-
出版物
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume 31, Issue 5, Pages 707-718
出版商
Springer Nature
发表日期
2011-08-01
DOI
10.1007/s11090-011-9310-7

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