Excellent organic/inorganic transparent thin film moisture barrier entirely made by hot wire CVD at 100 °C

Polymer layers by initiated chemical vapor deposition for thin film gas barrier encapsulation

(2011) D.A. Spee et al.   THIN SOLID FILMS

Super H2O-barrier film using Cat-CVD (HWCVD)-grown SiCN for film-based electronics

(2011) Hiroshi Nakayama et al.   THIN SOLID FILMS

Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers

(2010) P. F. Carcia et al.   APPLIED PHYSICS LETTERS

Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones

(2010) Anna Maria Coclite et al.   Plasma Processes and Polymers

Reliable thin film encapsulation for organic light emitting diodes grown by low-temperature atomic layer deposition

(2009) J. Meyer et al.   APPLIED PHYSICS LETTERS

Deposition of silicon nitride thin films by hot-wire CVD at 100 °C and 250 °C

(2009) P. Alpuim et al.   THIN SOLID FILMS

A single-layer permeation barrier for organic light-emitting displays

(2008) Prashant Mandlik et al.   APPLIED PHYSICS LETTERS

Deposition of device quality silicon nitride with ultra high deposition rate (>7 nm/s) using hot-wire CVD

(2007) V. Verlaan et al.   THIN SOLID FILMS