Nondestructive investigation of interface states in high-k oxide films on Ge substrate using X-ray absorption spectroscopy

标题
Nondestructive investigation of interface states in high-k oxide films on Ge substrate using X-ray absorption spectroscopy
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume 6, Issue 4, Pages 181-183
出版商
Wiley
发表日期
2012-03-12
DOI
10.1002/pssr.201206059

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