期刊
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
卷 248, 期 3, 页码 588-593出版社
WILEY-BLACKWELL
DOI: 10.1002/pssb.201046336
关键词
semipolar GaN; patterned sapphire; MOVPE; coalescence; marker layer
资金
- Deutsche Forschungsgemeinschaft within the research group Polarization Field Control in Nitride Light Emitters (PolarCoN) [Scho 393/22-1]
Semipolar (11 (2) over bar2) oriented GaN has been grown on a pre-structured r-plane sapphire substrate. By using silicon doped marker layers (MLs) we have been able to monitor the growth evolution of the stripes until coalescence. With that technique we correlated the growth type (direction) with the results of cathodoluminescence (CL) and transmission electron microscopy. Both characterization methods show only a few defects for the major part of the structure and a relatively high defect density for material grown in a-direction at one side of the stripes. It is shown that during coalescence these defects are mainly terminated resulting in a flat, planar (11 (2) over bar2) GaN layer with strongly reduced defect density. Additionally, X-ray diffraction (XRD) measurements show the high quality of these layers. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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