Dependence of Ga-doped ZnO thin film properties on different sputtering process parameters: Substrate temperature, sputtering pressure and bias voltage

标题
Dependence of Ga-doped ZnO thin film properties on different sputtering process parameters: Substrate temperature, sputtering pressure and bias voltage
作者
关键词
Thin films, Transparent conducting oxide, Gallium-doped zinc oxide, Sputtering, Electrical properties, Pressure, Bias voltage, Substrate temperature
出版物
THIN SOLID FILMS
Volume 586, Issue -, Pages 13-21
出版商
Elsevier BV
发表日期
2015-04-22
DOI
10.1016/j.tsf.2015.04.036

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