Optical properties of ultrathin Al2O3/ZnO nanolaminates

标题

作者

关键词

Atomic Layer Deposition, Amorphous nanolaminates, ZnO, Ultrathin films, Optical properties

出版物

Volume 594, Issue -, Pages 96-100

出版商

Elsevier BV

发表日期

2015-11-11

DOI

10.1016/j.tsf.2015.10.018

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