4.4 Article

Effect of deposition atmosphere on the structure and properties of Mg doped CuCrO2 thin films prepared by direct current magnetron sputtering

期刊

THIN SOLID FILMS
卷 595, 期 -, 页码 124-128

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.10.061

关键词

Delafossite; CuCrO2; Thin films; Sputtering; Transparent conducting oxide

资金

  1. National Natural Science Foundation [51172237, 61306083]

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CuCr0.97Mg0.03O2 thin films were prepared by direct current magnetron sputtering under various percentage of oxygen flow rate (PO) followed by post-annealed in N-2 atmosphere. The microstructures, optical and electrical properties of the films were investigated. The film deposited in pure Ar atmosphere showed pure CuCrO2 phase, while the films deposited in O-2 and Ar mixture atmosphere showed CuO and CuCr2O4 mixture phase. After post-annealed at 800 degrees C, the films deposited in O-2 and Ar mixture atmosphere turned into c-axis oriented single-phase CuCrO2 which showed much better transparency and electrical conductivity than the film deposited in pure Ar. The film deposited in P-O = 40% with thickness of 350 nm showed the lowest resistivity of 0.4 Omega cm and transmittance over 60% in visible light region. (C) 2015 Elsevier B.V. All rights reserved.

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