Mechanical characterization of a-C:H:SiO x coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method

标题
Mechanical characterization of a-C:H:SiO x coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method
作者
关键词
Diamond-like carbon, Silicon, Radio-Frequency Plasma-Assisted Chemical Vapour Deposition, Stress
出版物
THIN SOLID FILMS
Volume 590, Issue -, Pages 299-305
出版商
Elsevier BV
发表日期
2015-08-13
DOI
10.1016/j.tsf.2015.08.017

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