Using hot wire and initiated chemical vapor deposition for gas barrier thin film encapsulation

出版年份 2015 全文链接

标题

作者

关键词

HWCVD, iCVD, Permeation barrier, Organic/inorganic multilayer

出版物

Volume 575, Issue -, Pages 67-71

出版商

Elsevier BV

发表日期

2014-10-12

DOI

10.1016/j.tsf.2014.10.029

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