Growth, characterization and interfacial reaction of magnetron sputtered Pt/CeO2thin films on Si and Si3N4substrates

标题
Growth, characterization and interfacial reaction of magnetron sputtered Pt/CeO2thin films on Si and Si3N4substrates
作者
关键词
-
出版物
SURFACE AND INTERFACE ANALYSIS
Volume 47, Issue 7, Pages 777-784
出版商
Wiley
发表日期
2015-05-13
DOI
10.1002/sia.5774

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