XPS studies on the interaction of CeO2 with silicon in magnetron sputtered CeO2 thin films on Si and Si3N4 substrates

出版年份 2013 全文链接

标题

XPS studies on the interaction of CeO2 with silicon in magnetron sputtered CeO2 thin films on Si and Si3N4 substrates

作者

关键词

-

出版物

APPLIED SURFACE SCIENCE

Volume 283, Issue -, Pages 297-303

出版商

Elsevier BV

发表日期

2013-06-28

DOI

10.1016/j.apsusc.2013.06.104

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Protocol

Reagent

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