Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

Electrode-shaping for the excitation and detection of permitted arbitrary modes in arbitrary geometries in piezoelectric resonators

(2012) Jeffrey Pulskamp et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Development of a PZT MEMS Switch Architecture for Low-Power Digital Applications

(2011) Robert M. Proie et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

(2011) P. Muralt et al.   MRS BULLETIN

Modeling and Optimal Low-Power On–Off Control of Thin-Film Piezoelectric Rotational Actuators

(2010) Biju Edamana et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Piezoelectric MEMS sensors: state-of-the-art and perspectives

(2009) S Tadigadapa et al.   MEASUREMENT SCIENCE and TECHNOLOGY

The First Takeoff of a Biologically Inspired At-Scale Robotic Insect

(2008) R.J. Wood   IEEE Transactions on Robotics

Thin-Film PZT Lateral Actuators With Extended Stroke

(2008) K.R. Oldham et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Recent Progress in Materials Issues for Piezoelectric MEMS

(2008) Paul Muralt   JOURNAL OF THE AMERICAN CERAMIC SOCIETY