Surface modification and fabrication of 3D nanostructures by atomic layer deposition

标题
Surface modification and fabrication of 3D nanostructures by atomic layer deposition
作者
关键词
-
出版物
MRS BULLETIN
Volume 36, Issue 11, Pages 887-897
出版商
Cambridge University Press (CUP)
发表日期
2011-11-18
DOI
10.1557/mrs.2011.264

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