标题
Micropatterning PEDOT:PSS layers
作者
关键词
PDMS, Silicon Nitride, Conductive Polymer, Etch Rate, Oxygen Plasma
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 19, Issue 6, Pages 895-903
出版商
Springer Nature
发表日期
2012-11-23
DOI
10.1007/s00542-012-1696-5
参考文献
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