Self-alignment of micro-parts using capillary interaction: Unified modeling and misalignment analysis

标题
Self-alignment of micro-parts using capillary interaction: Unified modeling and misalignment analysis
作者
关键词
-
出版物
MICROELECTRONICS RELIABILITY
Volume 53, Issue 8, Pages 1137-1148
出版商
Elsevier BV
发表日期
2013-05-24
DOI
10.1016/j.microrel.2013.04.009

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