The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems

标题
The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems
作者
关键词
-
出版物
MICROELECTRONICS RELIABILITY
Volume 52, Issue 1, Pages 271-281
出版商
Elsevier BV
发表日期
2011-09-30
DOI
10.1016/j.microrel.2011.08.021

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