Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries

标题
Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 109, Issue -, Pages 129-132
出版商
Elsevier BV
发表日期
2013-03-16
DOI
10.1016/j.mee.2013.03.022

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