Investigating the effect of diamond size and conditioning force on chemical mechanical planarization pad topography

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 87, Issue 4, Pages 553-559

出版商

Elsevier BV

发表日期

2009-08-26

DOI

10.1016/j.mee.2009.08.007

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