Lifetime of hafnium oxide dielectric in thin-film devices fabricated on deformable softening polymer substrate

标题
Lifetime of hafnium oxide dielectric in thin-film devices fabricated on deformable softening polymer substrate
作者
关键词
-
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 88, Issue -, Pages 273-277
出版商
Elsevier BV
发表日期
2018-08-31
DOI
10.1016/j.mssp.2018.08.010

向作者/读者发起求助以获取更多资源

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started