期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 21, 期 -, 页码 194-199出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2013.10.027
关键词
DLC; Laser ablation; Solar cell; RTA
Heterojunction solar cells were fabricated by the deposition of un-doped amorphous carbon on mono-crystalline n-type silicon wafer (a-C/Si) using a frequency doubled pulsed Nd:YAG laser under vacuum followed by rapid thermal annealing (RTA). Structural and optical properties were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive x-ray (EDX), atomic force microscopy (AFM), Fourier transformation infrared spectroscopy (FTIR), and UV-vis transmittance. Optical properties investigation showed a 2.2 eV optical band gap of the amorphous carbon. I-V characteristics indicated a good rectification of the a-C/Si heterojunction with an ideality factor of 3. The 30 s annealed a-C/Si solar cell at 600 degrees C showed the highest conversion efficiency (n=1.1%). The maximum open circuit voltage (V-oc) and short circuit current density (J(sc)) of the cells were 250 mV and 33.3 mA/cm(2) respectively. The photo-response of the cells was significantly improved after RTA. (C) 2013 Elsevier Ltd. All rights reserved.
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