Effects of oxygen concentration on the properties of Al-doped ZnO transparent conductive films deposited by pulsed DC magnetron sputtering

标题
Effects of oxygen concentration on the properties of Al-doped ZnO transparent conductive films deposited by pulsed DC magnetron sputtering
作者
关键词
-
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 16, Issue 3, Pages 997-1001
出版商
Elsevier BV
发表日期
2013-03-14
DOI
10.1016/j.mssp.2013.02.012

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