Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions

出版年份 2013 全文链接

标题

作者

关键词

出版物

Volume 16, Issue 6, Pages 1428-1433

出版商

Elsevier BV

发表日期

2013-07-05

DOI

10.1016/j.mssp.2013.05.017

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