Black germanium produced by inductively coupled plasma etching - Peeref

标题

Black germanium produced by inductively coupled plasma etching

作者

关键词

-

出版物

MATERIALS LETTERS

Volume 94, Issue -, Pages 86-88

出版商

Elsevier BV

发表日期

2012-12-20

DOI

10.1016/j.matlet.2012.12.014

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Protocol

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