期刊
MATERIALS LETTERS
卷 64, 期 13, 页码 1427-1429出版社
ELSEVIER
DOI: 10.1016/j.matlet.2010.03.040
关键词
Laser processing; Microstructure; Surfaces
资金
- Harbin Institute of Technology at Weihai
Long spiral-shaped microfluidic channels in glass have been fabricated by femtosecond laser direct writing After hydrofluoric acid etching and post baking, the laser modified regions in glass formed hollow microstructures The diameter size and the screw-pitch of the channels can be set freely The experimental results showed that the etched internal surface of the microchannel by hydrofluoric acid will become smoother after the subsequent baking The incident laser power and scanning speed can also influence the channel quality Crown Copyright (C) 2010 Published by Elsevier BV All rights reserved
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