Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array

标题
Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array
作者
关键词
-
出版物
MATERIALS LETTERS
Volume 64, Issue 11, Pages 1268-1270
出版商
Elsevier BV
发表日期
2010-03-09
DOI
10.1016/j.matlet.2010.03.005

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