期刊
MATERIALS LETTERS
卷 63, 期 3-4, 页码 457-460出版社
ELSEVIER
DOI: 10.1016/j.matlet.2008.11.007
关键词
Porous anodic alumina; Focused ion-beam; Nanopore membranes; Single nanopores; Nanopore arrays
资金
- Australian Research Council [DP 0770930]
- Australian Microscopy and Microanalysis Research Facility (AMMRF)
Anodized aluminium oxide (AAO) fabricated by electrochemical anodization of aluminium is used as the substrate for focused ion-beam (FIB) fabrication of single nanopore and nanopore arrays. The method is based on the controlled and selective removal of AAO barrier oxide film by FIB milling. FIB process with different milling conditions is applied to open single nanopores (diameter of 60 nm) or circular nanopore arrays with a different number of opened pores on AAO substrate. This process combines a low cost AAO substrate and FIB milling, and offers an economically viable alternative for the fabrication of nanopore devices with controlled dimensions for a range of applications in nanofluidics, molecular separations and biosensing. Crown Copyright (C) 2008 Published by Elsevier B.V. All rights reserved.
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