Basic research on polishing with ice bonded nanoabrasive pad

标题
Basic research on polishing with ice bonded nanoabrasive pad
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 3, Pages 1514
出版商
American Vacuum Society
发表日期
2009-05-31
DOI
10.1116/1.3125272

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