Fabrication of high-aspect ratio silicon nanopillars and nanocones using deep reactive ion etching

标题
Fabrication of high-aspect ratio silicon nanopillars and nanocones using deep reactive ion etching
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 2732
出版商
American Vacuum Society
发表日期
2009-12-15
DOI
10.1116/1.3246359

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