期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 27, 期 6, 页码 2408-2412出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.3259911
关键词
CVD coatings; diamond; elemental semiconductors; semiconductor thin films; thermal conductivity; thermal conductivity measurement
资金
- Korean Science and Engineering Foundation [R01-2006-000-11060-0]
- National Research Foundation of Korea [R01-2006-000-11060-0] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The authors developed an experimental method that can measure the in-plane thermal conductivity of a thin film and the interface thermal conductance between the film and the metal strip, simultaneously. This technique, the in-plane 3 omega method, can be applied to the films with very high thermal conductivity such as diamond films. To guarantee the reliability of the measurement, the factors causing error were analyzed rigorously. Then, the method was demonstrated on silicon dioxide and silicon nitride films and was valid in experiments performed in the open atmosphere. They also applied the method on several chemical vapor deposited diamond films of different thicknesses and pretreatment methods. The data are comparable with those from previous researches.
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