Fabrication of functional structures at Si (100) surface by mechanical scribing in the presence of aryl diazonium salts

出版年份 2009 全文链接

标题

Fabrication of functional structures at Si (100) surface by mechanical scribing in the presence of aryl diazonium salts

作者

关键词

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出版物

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Volume 27, Issue 3, Pages 1399

出版商

American Vacuum Society

发表日期

2009-05-31

DOI

10.1116/1.3137025

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