Hafnium oxide thin films: Effect of growth parameters on oxygen and hafnium vacancies

标题
Hafnium oxide thin films: Effect of growth parameters on oxygen and hafnium vacancies
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 1, Pages 325
出版商
American Vacuum Society
发表日期
2009-02-12
DOI
10.1116/1.3043474

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