Effect of temperature on copper damascene chemical mechanical polishing process

标题
Effect of temperature on copper damascene chemical mechanical polishing process
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 1, Pages 141
出版商
American Vacuum Society
发表日期
2008-02-16
DOI
10.1116/1.2825143

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