Investigation on spatially separated atomic layer deposition by gas flow simulation and depositing Al2O3 films

标题
Investigation on spatially separated atomic layer deposition by gas flow simulation and depositing Al2O3 films
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 5, Pages 051504
出版商
American Vacuum Society
发表日期
2012-07-14
DOI
10.1116/1.4737123

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