Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films

标题
Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 5, Pages 051512
出版商
American Vacuum Society
发表日期
2011-08-16
DOI
10.1116/1.3622619

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