Classical size effect in oxide-encapsulated Cu thin films: Impact of grain boundaries versus surfaces on resistivity

标题
Classical size effect in oxide-encapsulated Cu thin films: Impact of grain boundaries versus surfaces on resistivity
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 4, Pages 605-609
出版商
American Vacuum Society
发表日期
2008-09-18
DOI
10.1116/1.2938395

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