Comparison of methods to determine bandgaps of ultrathin HfO2 films using spectroscopic ellipsometry

标题
Comparison of methods to determine bandgaps of ultrathin HfO2 films using spectroscopic ellipsometry
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 4, Pages 041001
出版商
American Vacuum Society
发表日期
2011-06-25
DOI
10.1116/1.3597838

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